| 发明名称 |
SEMICONDUCTOR PRODUCTION UNIT |
| 摘要 |
PURPOSE:To stick a wafer and a mask to each other completely in a short time by a small adsorption force, by sticking the substrate to the mask from the center of the substrate. |
| 申请公布号 |
JPS53129586(A) |
申请公布日期 |
1978.11.11 |
| 申请号 |
JP19770044319 |
申请日期 |
1977.04.18 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
NAKASE MAKOTO;TSUCHIYA NOBUJI |
| 分类号 |
H01L21/027;H01L21/68 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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