| 摘要 |
The component includes a substrate of mono-crystalline silicon upon which is located a membrane (10) on the substrate upper side. Under the membrane, e.g. of SiN or SiO2, is located a cavity (14) which extends downwards in the substrate from the top side to the rear (20), so that the substrate rear side is unbroken and the cavity extends downwards by a predetermined amount. The cavity depth is 25 per cent of the component (11) width, whereby the electrical and magnetic influence of the substrate on the component is negligible. The component comprises a transmission conduit incorporating a signal conduit (11) surrounded by a parallel earth conductor (12,13). The extent of the cavity across the signal conduit is greater than the width of the signal conduit. The component consists of a conductor comprising superimposed layers of metal, comprising from the membrane and upwards titanium, platinum, nickel and gold. |
