Temperature compensation circuit for resistive bridge circuit of acceleration sensor

摘要

The temperature compensation circuit has a detecting element (1) which provides an output signal. The change in voltage (Va) with temperature is based on this output signal, which is adjusted by a temperature compensating resistor (6). A number of piezoresistive element (4a-4d) is connected to the detecting element and voltage is applied across these elements. A main piezoresistive element (14b) has the same characteristic as the temperature compensating main part (3). An almost constant signal which does not change with temperature, is fed to an output terminal (7). A first adjusting part adjusts the distance between the piezoresistive elements by varying the size of an output temperature characteristic curve. A second adjusting part adjusts the distance by counter balancing the temperature change in the output signal by providing a suitable signal.