Vacuum coating of disc-shaped substrates

摘要

Vacuum coating process for disc-shaped substrates, in which the substrate is conveyed on a substrate carrier into a vacuum coating chamber and is coated with parts of the substrate surface covered by masks. The substrate carrier (12) conveys the substrate directly into the coating position in an entry chamber (11) and seals the entry chamber (11) automatically against the surrounding atmos., the entry chamber (11) being evacuated and then opened to the coating chamber (2) for the coating operation. Appts. for the process is also claimed.