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发明名称
摘要
申请公布号
JPH08504297(A)
申请公布日期
1996.05.07
申请号
JP19930515973
申请日期
1993.03.10
申请人
发明人
分类号
H01L29/73;H01L21/331;H01L21/822;H01L27/02;H01L27/04;H01L27/06;H01L29/732;(IPC1-7):H01L27/04;H01L23/522;H01L23/556;H01L23/60;H01L23/62
主分类号
H01L29/73
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代理人
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地址
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