PIEZOELECTRIC ACTUATOR AND MANUFACTURE THEREOF

摘要

PURPOSE: To generate displacement vertical to the horizontal plane of a film having piezoelectricity, and to obtain excellent piezoelectric characteristics by composing at least one of electrodes of platinum or palladium and applying voltage between the opposed electrodes by a piezoelectric body containing lead as the film. CONSTITUTION: A film containing lead and having piezoelectricity on platinum electrodes 1 oriented on a lower electrode such as a (100) face is constituted of a perovskite type PZT thin-film 2. According to the constitution, the perovskite type PZT thin-film can be grown with excellent crystallizability while being oriented in a (001) face. The piezoelectric thin-film is oriented with superior crystallizability, thus generating the large quantity of displacement and large stress to the application of piezoelectricity. The shape of a formed actuator can be made smaller than a sintered body is cut out and machined through a conventional method because the film is formed in a thin-film shape.