| 摘要 |
PURPOSE: To provide a small-sized light-weight piezoelectric element, which uses a lead zirco-titanate(PZT) film and has excellent accuracy and cost of which is reduced, and manufacture, in which the piezoelectric element can be manufactured without employing a precision micromachining technique. CONSTITUTION: A connecting electrode 4 is formed to an element holding substrate 1, in which there is a penetrated space section and which is made of alumina. An element substrate, in which KBr powder 2 is melted in the space section of the substrate 1 and the space section is filled with the powder, is prepared. A KBr filled section is polished and smoothed, and a Pt lower electrode grown in an epitaxial manner in the <100> direction to a film surface is formed onto the surface of the KBr filled section by using a mask having a cantilever type pattern. PZT films 5 crystal-oriented in an axis (c) are formed through an rf magnetron sputtering method, and Al leading-out electrode films 6 are formed onto the surfaces of the films 5. Accordingly, a manufactured structure is washed by water and treated, and the KBr filled section 2 is removed, thus preparing a piezoelectric element 9. |
