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发明名称
MICRO-ACTUATOR
摘要
申请公布号
JPH08114278(A)
申请公布日期
1996.05.07
申请号
JP19950239230
申请日期
1995.08.24
申请人
HEWLETT PACKARD CO <HP>
发明人
KURISUTOFUAA SHII BETEII;JIEIMUZU DABURIYUU BEIKAA
分类号
F16K31/66;B81B3/00;F15C5/00;F16K31/64;F16K99/00;G05D7/03;H01L21/306;(IPC1-7):F16K31/66
主分类号
F16K31/66
代理机构
代理人
主权项
地址
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