SUBSTRATE INSPECTION APPARATUS AND PROBE CONTACT POSITION ADJUSTING METHOD THEREOF,申请号JP19940249445-传众专利搜索

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发明名称	SUBSTRATE INSPECTION APPARATUS AND PROBE CONTACT POSITION ADJUSTING METHOD THEREOF
摘要
申请公布号	JPH08114648(A)	申请公布日期	1996.05.07
申请号	JP19940249445	申请日期	1994.10.14
申请人	TOSHIBA CORP	发明人	WATANABE KENICHI
分类号	G01R1/06;G01R31/28;H05K1/02;(IPC1-7):G01R31/28	主分类号	G01R1/06
代理机构		代理人
主权项
地址

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