INTEGRATION-TYPE SPM SENSOR,申请号JP19940273067-传众专利搜索

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发明名称	INTEGRATION-TYPE SPM SENSOR
摘要
申请公布号	JPH08114611(A)	申请公布日期	1996.05.07
申请号	JP19940273067	申请日期	1994.10.13
申请人	OLYMPUS OPTICAL CO LTD	发明人	TAKAYAMA MICHIO
分类号	G01B7/34;G01B7/00;G01N37/00;G01Q60/06;G01Q60/22;G01Q60/38;H01J9/14;H01J37/28;(IPC1-7):G01N37/00	主分类号	G01B7/34
代理机构		代理人
主权项
地址

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