METHOD AND SYSTEM FOR DEPOSITING WIRING FILM,申请号JP19940247481-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR DEPOSITING WIRING FILM
摘要
申请公布号	JPH08115977(A)	申请公布日期	1996.05.07
申请号	JP19940247481	申请日期	1994.10.13
申请人	SONY CORP	发明人	ENOMOTO YASUYUKI
分类号	H01L21/28;H01L21/203;H01L21/205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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