| 摘要 |
PURPOSE: To drive a movable part to a target position with high precision by calculating the relation between the position of the movable part and the change rate of the position of the movable part on a controlled variable to be inputted to a driving part, afterwards, calculating a controlled variable to the target position and controlling the driving part based on this controlled variable. CONSTITUTION: The relation is divided into the relation between a position Z and a controlled variableμof the movable part and the relation between a position Z' not including a hysteresis amount (h) and the controlled variable (S1). Next, the hysteresis amount (h) is differentiated by the controlled variableμ, the target position is set and the relation between the controlled variableμin a driving direction and the hysteresis amount (h) is calculated (S4 and S5). Then, based on the relation between the position Z' not including the hysteresis amount (h), the controlled variableμin the driving direction and the hysteresis amount (h), the relation between the controlled variableμand the position Z at the time of driving from a current position in the driving direction is calculated. This result is shown in a graph and based on this graph, the controlled variableμfor driving the movable part to the target position is decided (S8).
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