PLASMA PROCESSOR,申请号JP19940253256-传众专利搜索

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发明名称	PLASMA PROCESSOR
摘要
申请公布号	JPH08115905(A)	申请公布日期	1996.05.07
申请号	JP19940253256	申请日期	1994.10.19
申请人	OKI ELECTRIC IND CO LTD	发明人	ORITA TOSHIYUKI
分类号	H05H1/46;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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