| 摘要 |
<p>PURPOSE: To provide a cold cathode which provides good controllability for current flowing through it and whose structure is so simple that it is easy to fabricate. CONSTITUTION: A base 22B in the form of a truncated cone formed integral with a P-type silicon substrate 11 is provided on the principal plane of the P-type silicon substrate 11, and a cone-shaped end 22T formed from N-type silicon is provided on the upper surface of the base 22B, so that the base 22B and the end 22T together form a cone-shaped cathode 22. A silicon oxide film 13 and a gate electrode 14 are sequentially formed on the P-type silicon substrate 11 in such a way as to surround the cathode 22, to form a laminate structure. The cold cathode having therein the constitution required to limit current, being capable of limiting current with good controllability as an independent single cathode, having a simple structure, and allowing easy fabrication can thus be obtained.</p> |
