MANUFACTURING EQUIPMENT FOR ALLOY THICK FILM HAVING HYDROGEN ABSORBING FUNCTION AND ITS METHOD

摘要

PURPOSE: To provide hydrogen storage alloy thick film manufacturing equipment capable of forming an alloy thick film having a thickness of 1μm or more and having a hydrogen absorbing function. CONSTITUTION: Lanthanum vapor and nickel vapor are generated from boats 2, 3 heated by electron beams 4, 5 and moved to an RF coil 9. Lanthanum vapor and nickel vapor are RF-excited in the RF coil and converted into plasma, then after a specified kinetic energy is given, the plasma is irradiated to a nickel substrate 6. At the same time, hydrogen ions are irradiated to the nickel substrate from an ion gun 10. A film by binary simultaneous vapor deposition of lanthanum and nickel is formed on the surface of the nickel substrate.