| 摘要 |
PURPOSE: To prevent improper holding, position displacement and flawing of a substrate from occurring when a workpiece is sucked to be held. CONSTITUTION: In a sucker holding device 20 of holding a workpiece P sucked, the device comprises a device main unit 25, sucker hole 26a formed in this device main unit, suction means 28 of generating suction force in the sucker hole 26a and an elastic pad 26b mounted on the sucker hole 26a to elastically hold the workpiece P sucked to the sucker hole 26a. |
