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发明名称
SEMICONDUCTOR DEVICE AND ITS FABRICATION
摘要
申请公布号
JPH08115974(A)
申请公布日期
1996.05.07
申请号
JP19940252255
申请日期
1994.10.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
OKADA MASAKAZU
分类号
H01L21/76;H01L21/822;H01L21/8249;H01L27/04;H01L27/06;H01L27/08;(IPC1-7):H01L21/76;H01L21/824
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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