| 摘要 |
PCT No. PCT/JP93/00711 Sec. 371 Date Feb. 2, 1994 Sec. 102(e) Date Feb. 2, 1994 PCT Filed May 27, 1993 PCT Pub. No. WO93/24860 PCT Pub. Date Dec. 9, 1993.A composition for forming anti-reflection film on resist surface which comprises an aqueous solution of a water soluble fluorine compound, and a pattern formation method which comprises the steps of coating a photoresist composition on a substrate; coating the above-mentioned composition for forming anti-reflection film; exposing the coated film to form a specific pattern; and developing the photoresist, are provided. Since the composition for forming anti-reflection film can be coated on the photoresist in the form of an aqueous solution, not only the anti-reflection film can be formed easily, but also, the film can be removed easily by rinsing with water or alkali development. Therefore, by the pattern formation method according to the present invention, it is possible to form a pattern easily with a high dimensional accuracy.
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