发明名称 Magnetic modulation of force sensor for AC detection in an atomic force microscope
摘要 In a scanning force microscope a thin film of a magnetic material is applied to one or both surfaces of a force sensing cantilever. The cantilevers are then placed between the poles of an electromagnet and a magnetizing field applied in the direction of the soft axis of the cantilevers. The field is chosen so as to be bigger than the saturation field for the magnetic film. A small electromagnet is placed in the housing of the microscope so as to generate a field normal to the soft axis of the cantilever. The field is generated by an ac voltage and causes a time varying force to be applied to the cantilever. The corresponding modulation of the cantilever position is sensed by reflection of a laser beam into a position sensitive detector. The magnitude and phase of this signal are determined by a synchronous detector. Images of the sample surface are made at constant force gradient by scanning the cantilever over the surface while adjusting the gap between the probe and sample so as to maintain a constant output from the synchronous detector.
申请公布号 US5513518(A) 申请公布日期 1996.05.07
申请号 US19950403238 申请日期 1995.03.10
申请人 MOLECULAR IMAGING CORPORATION 发明人 LINDSAY, STUART M.
分类号 G01B5/28;B81B3/00;G01B7/34;G01B21/30;G01N37/00;G01Q10/06;G01Q30/14;G01Q60/24;G01Q60/32;G01Q60/38;(IPC1-7):G01B5/28 主分类号 G01B5/28
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