| 摘要 |
PURPOSE: To provide a piezoelectric/electrostrictive film type actuator capable of obtaining large displacement by relatively-low driving voltage, quick in responding and capable of generating a large force, and capable of being highly integrated. CONSTITUTION: The piezoelectric/electrostrictive drive part, having a construction obtained by laminating a first electrode film 4, a piezoelectric/ electrostrictive film 6, and a second electrode film 8 into layers successively, of a piezoelectric/electrostrictive film type actuator is made of a polycrystalline substance of ceramic material composed mainly of at least more than one kind of aluminum oxide, magnesium oxide, zirconium oxide, aluminum nitride, and silicon nitride. Besides, it is formed on a ceramic substrate 2 containing lead elements in the form of an oxide etc., at least in the grain boundary of at least a section for a piezoelectric/electrostrictive drive part to be formed of the polycrystalline substance. |
