SOLID-STATE CHEMICAL SENSOR

摘要

The invention pertains to a solid-state chemical sensor with a substrate support, on the underside of which is mounted a heating element with branch circuit connections and on the top surface of which are arranged interdigital electrodes and thereon a carbon dioxide-sensitive material which consists essentially of CuO and TiO3, as well as additional metal oxides, in the form of a thick film of approximately 50-200 mu m.