| 发明名称 |
Verfahren zur Benutzung einer Vorrichtung zur Ziehung Einkristallstaben |
| 摘要 |
The object is to enable appropriate control of single crystal growth after the recovery from power failure when controlling in an automatic mode. A source voltage is supplied to a controller 70 through a no-break power supply 62. At the time of recovery from power failure, the controller continues the automatic operation mode with the same control output as that stored when power failure is detected (84, 85) if the power failure time t is t </= t1 (for example, 1 second), switches the control mode to the manual control mode with the same control output as that stored when the power failure is detected (86, 87) if t1 < t </= t2 (for example, 5 seconds), stops the crystal growth operation and switches the control mode to the manual control mode (88, 89) if t2 < t </= t3 (for example, 600 seconds), and separates the grown crystal from a melt 22 by upwardly moving the crystal and upwardly moves a crucible 16 (90) if t > t3. <IMAGE> |
| 申请公布号 |
DE69206717(T2) |
申请公布日期 |
1996.05.02 |
| 申请号 |
DE1992606717T |
申请日期 |
1992.08.24 |
| 申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP |
发明人 |
HIRANO YOSHIHIRO, KOHU-APPARTMENT BLDG. A-3O4, GUNMA 379-O1, JP;OZAKI, ATSUSHI KOHU-APPARTMENT BLDG. A-6O5,, GUNMA 379-01, JP;URANO, MASAHIKO,, GUNMA 37O, JP |
| 分类号 |
C30B15/20;(IPC1-7):C30B15/20;C30B15/00;C30B15/30 |
主分类号 |
C30B15/20 |
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