发明名称 Function testing apparatus for integrated circuit
摘要 The function test apparatus includes a test-standard appropriate to the applications of the circuit to be tested (16) against which the output of the circuit can be measured. A semiconductor chip (14) is provided which can programmed to at least one part of this test-standard and is linked through a contact element (15) with the circuit. This arrangement tests the circuit directly when electrical contact is made. Wafers may be used instead of chips. The contact element is made from a piezoelectric conductive rubber.
申请公布号 DE19540621(A1) 申请公布日期 1996.05.02
申请号 DE19951040621 申请日期 1995.10.31
申请人 NEC CORP., TOKIO/TOKYO, JP 发明人 NAKAIZUMI, KAZUO, TOKIO/TOKYO, JP
分类号 G01R31/28;G01R31/3185;H01L21/66;(IPC1-7):G01R31/318;H01L25/065;G01R31/26 主分类号 G01R31/28
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