发明名称 |
Function testing apparatus for integrated circuit |
摘要 |
The function test apparatus includes a test-standard appropriate to the applications of the circuit to be tested (16) against which the output of the circuit can be measured. A semiconductor chip (14) is provided which can programmed to at least one part of this test-standard and is linked through a contact element (15) with the circuit. This arrangement tests the circuit directly when electrical contact is made. Wafers may be used instead of chips. The contact element is made from a piezoelectric conductive rubber.
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申请公布号 |
DE19540621(A1) |
申请公布日期 |
1996.05.02 |
申请号 |
DE19951040621 |
申请日期 |
1995.10.31 |
申请人 |
NEC CORP., TOKIO/TOKYO, JP |
发明人 |
NAKAIZUMI, KAZUO, TOKIO/TOKYO, JP |
分类号 |
G01R31/28;G01R31/3185;H01L21/66;(IPC1-7):G01R31/318;H01L25/065;G01R31/26 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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