发明名称 Verfahren zur Herstellung elektrischer Schaltungsträger
摘要 To manufacture electrical circuit bases with extremely fine conducting paths, laminates without metal foil coverings are used as the initial materials; to produce the holes, a temporary metal layer is applied to the laminate surfaces, that metal layer is structured and etched and removed from the laminate surfaces once the holes have been etched in the laminate. A foundation metal layer is then deposited on the laminate surfaces, including the hole walls, to create the conducting paths; this is done by the glow discharge decomposition of volatile metal compounds. Further metal layers are applied to those layers without current and/or electrolytically. The metal layers are structured using photomask techniques.
申请公布号 DE4438777(A1) 申请公布日期 1996.05.02
申请号 DE19944438777 申请日期 1994.10.18
申请人 ATOTECH DEUTSCHLAND GMBH, 10553 BERLIN, DE 发明人 MEYER, HEINRICH, DR., 14109 BERLIN, DE
分类号 H05K3/42;C23C16/18;C23C18/30;H05K3/00;H05K3/06;H05K3/14;H05K3/38;H05K3/46;(IPC1-7):H05K3/18 主分类号 H05K3/42
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