Quelle zur Erzeugung eines schnellen Atomstrahls,申请号DE19916018286-传众专利搜索

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发明名称	Quelle zur Erzeugung eines schnellen Atomstrahls
摘要
申请公布号	DE69118286(D1)	申请公布日期	1996.05.02
申请号	DE19916018286	申请日期	1991.08.28
申请人	EBARA CORP., TOKIO/TOKYO, JP	发明人	NAGAI, KAZUTOSHI, NERIMA-KU, TOKYO, JP;ITOH, KANICHI, YOKOHAMA-SHI, KANAGAWA-KEN, JP
分类号	G21K5/00;H01J37/06;H01J37/08;H05H3/02;(IPC1-7):H05H3/00	主分类号	G21K5/00
代理机构		代理人
主权项
地址

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