Comparable capacitive sensor for moisture detection in thin film process control

摘要

The sensor includes a base electrode (3), a deck electrode (1), and a dielectric polymer layer (2) between the electrodes. The electrodes each have a supply connection (7). The base electrode is provided with a number of different component surfaces (3a-3i) independently joined to a contact path (8) leading to the base electrode connection. A gap (9) in the deck electrode forms a slit (5) crossing the base electrode at the contact path. contact paths must be identical to one another either side of this slit. The sensors determine the nominal capacitance value of the sensor, measure the value at a known moisture level, and determining those electrode surfaces by which the contact paths must divide to attain the nominal value. These are divided accordingly using a laser.