CLEANING AGENT, METHOD AND EQUIPMENT

摘要

A cleaning agent which can substitute for chlorofluorocarbon or chlorinated solvents, a method of cleaning therewith, and equipment therefor. In particular, a method of cleaning electronics parts such as printed boards or mounted parts or metallic parts which makes it possible to remove various contaminants from the parts and dry the same to the extent comparative to that of the method of cleaning with chlorofluorocarbon or chlorinated solvents, and a cleaning agent and equipment therefor. Examples of the cleaning agent include polar cleaning agents with a solubility parameter of 9 or above or a permittivity of 4 or above, mixtures thereof with other cleaning agents with a solubility parameter of less than 9 and a permittivity of less than 4, and cleaning agents containing as the active ingredient an azeotropic or pseudoazeotropic composition containing a low-molecular-weight siloxane compound. The cleaning method is characterized by comprising at least one step selected from the group consisting of the step of cleaning the object with a polar cleaning agent having a solubility parameter of 9 or above or a permittivity of 4 or above, the step of rinsing the object with a mixture of the above polar cleaning agent with another cleaning agent having a solubility parameter of less than 9 and a permittivity of less than 4, and the drying step.