| 摘要 |
<p>A force, weight or position sensor unit and sensor element (2) is disclosed in a first embodiment. In a second embodiment, the sensor element (2) of the first embodiment is incorporated into an apparatus for microindentation hardness testing and surface imaging which allows immediate imaging of the surface subsequent to hardness testing. The sensor uses a multi-capacitor system (2) having drive (8, 30) and pick-up plates (20) mounted on an appropriate suspension system (18) to provide the desired relative motion when a force is applied to the pick-up plate (20). The output signal is run through a buffer amplifier and synchronously demodulated to produce a signal proportional to force or displacement. The sensor element (56) is mounted on a scanning tunneling microscope base and a sample (52) mounted on the sensor (56). The force sensor (56) is used for both measuring the applied force during microindentation and for imaging the surface topography before and after the testing.</p> |
