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发明名称
A METHOD OF TREATING A SEMI-CONDUCTOR WAFER
摘要
申请公布号
EP0708982(A1)
申请公布日期
1996.05.01
申请号
EP19950918082
申请日期
1995.05.10
申请人
ELECTROTECH EQUIPMENTS LIMITED
发明人
DOBSON, CHRISTOPHER, DAVID;KIERMASZ, ADRIAN
分类号
H01L21/312;H01L21/316;(IPC1-7):H01L21/312
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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