发明名称 Polymers
摘要 Novel polymers as claimed in claim 1 may be used in resist formulations for the fabrication of printing plates and circuit boards and, in particular, for the fabrication of integrated circuits. No autocatalytic decomposition of the compounds occurs and the resist film obtained therewith has good adhesive properties.
申请公布号 EP0709410(A2) 申请公布日期 1996.05.01
申请号 EP19950810648 申请日期 1995.10.18
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 MERTESDORF, CARL-LORENZ, DR.
分类号 G03F7/039;C08F12/00;C08F212/14;C08F220/58;G03F7/004;H01L21/027 主分类号 G03F7/039
代理机构 代理人
主权项
地址