| 摘要 |
<p>Probe apparatus (1) includes a probe group supporting member having a substrate (S) on which probes (2) having conductive needles (22) are formed. The main bodies of the probes (2) are constructed from composite beams, e.g. L-shaped beams, formed by joining a plurality of arms, e.g. first and second arms (21A, 21B), which extend from the substrate (S) of the probe group supporting member, and which overhang the substrate (S) in a direction parallel to the surface of the substrate. The conductive needles (22) are attached perpendicular to the substrate surface at a selected point on each of the composite beams.</p> |
