| 摘要 |
PURPOSE: To obtain a compact and reliable acceleration sensor with less noise without using a carrier by providing a movable part with a movable gate electrode which is displaced by acceleration. CONSTITUTION: Movable gates G1 and G2 and a movable electrode MV for retention are provided on the surface of a semiconductor substrate as movable parts 10 for detecting acceleration. A differential amplification part 12 differentially receives the drain output of transistors 11 and 12 with the difference of voltages V1 and V2 by a load 15 and outputs a differential output signal. An integration part 14 integrates the differential output signal and outputs an output signal. The movable part 10 for detecting acceleration forms one portion of a detection circuit, can be compactly formed, and also detects signal differentially, thus detecting only the acceleration in one direction. Also, since transistors 11 and 12 can be formed at the same portion of the substrate, temperature drift does not give any influence. Similarly, the influence of power supply drift can be canceled out due to the differential signal, thus simply configuring a semiconductor device. |
