| 摘要 |
PURPOSE: To obtain an aluminum nitride sintered material having an electrically conductive metallized layer, excellent in binding strength between the metallized layer and a base material and free from separation by forming the metallized layer consisting of a specific three groups of components on the surface of the aluminum nitride sintered base material through simultaneous sintering. CONSTITUTION: A paste containing one or more than one kind of a substance selected from a group (the first group) consisting of Mo, W and Ta, or its compound, one or more than one kind of a substance selected from a group (the second group) consisting of Al and rare earth elements or its compound, and one or more than one kind of a substance selected from a group (the third group) consisting of Ti, Zr and Hf or its compound (when only hydride and/or oxide of Ti or Zr is selected, the component(s) of the third group should exceed 1/10 of the total amount of the first group in terms of weight ratio) is applied on a precursor of an aluminum nitride sintered material and subsequently the whole body is simultaneously sintered. |
