| 摘要 |
<p>PURPOSE: To convert waste gas contg. organometallic compds, as harmful components into harmless gas by using a manganese compd. as a reactive principal component of an organometallic compd. removing agent. CONSTITUTION: A manganese compd., preferably a mixture of 1 pt.wt. manganese compd. with <=1 pt.wt. copper compd. is used as a reactive principal component of a removing agent for removing organometallic compds. contained in waste gas from a semiconductor producing plant, etc. Waste gas contg. organometallic compds. can easily be made harmless only by packing the resultant removing agent into a column and passing the waste gas through the column and the organometallic compds. are not desorbed from the removing agent. The copper compd. can suppress the rise of the temp. of the removing agent due to heat of reaction.</p> |
