| 摘要 |
<p>PURPOSE: To obtain a semiconductor acceleration sensor for simple inspection of a shock resistance by mechanically displacing a sensor chip directly. CONSTITUTION: A sensor chip 1 where a diaphragm part 1a is formed and a gauge resistor 1b is provided on the reverse side is sealed to a thick-film substrate 12 by a pedestal 13. An aluminum electrode 2 is provided on a center axis in longer direction of the tip of a free edge on the surface of the sensor chip 1. A probe pin 3 directly and mechanically displaces the aluminum electrode 2 for testing shock resistance. The shock test can be performed by accurately positioning the probe pin without scratching and sliding the sensor chip.</p> |
