发明名称 |
Noncentering specimen prealigner having improved specimen edge detection and tracking |
摘要 |
A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. In a preferred embodiment, the rotary stage is mounted on the X-Y stage and receives a semiconductor (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan the peripheral edge (76) of the wafer across an optical scanning assembly (36) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.
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申请公布号 |
US5511934(A) |
申请公布日期 |
1996.04.30 |
申请号 |
US19940236207 |
申请日期 |
1994.05.02 |
申请人 |
KENSINGTON LABORATORIES, INC. |
发明人 |
BACCHI, PAUL E.;FILIPSKI, PAUL S. |
分类号 |
B65G47/24;H01L21/68;(IPC1-7):B65G47/24 |
主分类号 |
B65G47/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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