发明名称 |
Target assembly having inner and outer targets |
摘要 |
A target assembly for use in fabricating magnetic recording media is described. The target assembly has inner and outer concentric targets for sputter depositing on a substrate first and second layers having different compositions. Disposed adjacent each target is a magnetic means, and at least one which is reversible in magnetic-pole polarity. One polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the inner target only, when power is supplied to the inner target at a preselected level. The opposite polarity produces a magnetic flux sufficient to ignite a sputtering plasma in the outer target only, when power is supplied to the outer target at a preselected level.
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申请公布号 |
US5512150(A) |
申请公布日期 |
1996.04.30 |
申请号 |
US19950401449 |
申请日期 |
1995.03.09 |
申请人 |
HMT TECHNOLOGY CORPORATION |
发明人 |
BOUREZ, ALLEN J.;LAL, BRIJ B.;RUSSAK, MICHAEL A. |
分类号 |
C23C14/34;C23C14/35;G11B5/851;H01J37/34;(IPC1-7):C23C14/35 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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