发明名称 POSITIONING DEVICE
摘要 PURPOSE: To provide an inexpensive, highly durable, and highly reliable positioning device provided with a long-stroke multiphase type motor where several tens of coils can be connected to each other. CONSTITUTION: In a positioning device which moves a table 1 by selecting a coil to be energized from among linear motor coils 4 in accordance with the position of the table 1 detected by means of a position detector, first and second current amplifiers 15 are provided and, at the same time, odd-numbered coil groups in coil rows composed of three or more coils are connected to the first current amplifier 15 through a relay 19. In addition, even-numbered coil groups in the coil rows are connected to the second current amplifier 15 through another relay.
申请公布号 JPH08111998(A) 申请公布日期 1996.04.30
申请号 JP19940245274 申请日期 1994.10.11
申请人 CANON INC 发明人 OISHI SHINJI
分类号 G03F9/00;B23Q5/28;B60L13/03;H01L21/027;H01L21/68;H02K41/02;H02P7/00;H02P25/06 主分类号 G03F9/00
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