| 摘要 |
PURPOSE: To effectively and accurately polish a surface of a glass substrate. CONSTITUTION: Polishing rollers 54A and 54B rotate by travel of a polishing tape while bringing a winding polishing tape 56 into contact with a surface of a glass substrate. A rotary shaft 100 of these polishing rollers is engaged with a bearing part 102 so as to be freely rotatable and integrally movable in the axial direction (the arrow B direction). A bracket 110 engaged with an eccentric cam to be eccentrically rotated by a swinging motor 112 is connected to this bearing. Therefore, the polishing rollers 54A and 54B are reciprocated in the axial direction by the eccentric cam to be rotated by driving of the swinging motor. Therefore, the polishing tape 56 swings in the width direction when it travels in the opposite direction of the arrow A direction, and effectively polishes the surface of the glass substrate. |
