| 摘要 |
PURPOSE: To provide an optical fiber fixing structure capable of rapidly fixing an optical fiber simultaneously with high-accuracy positioning of several μm unit and further, a process for producing its module substrate. CONSTITUTION: A V-groove of the optical fiber fixing structure for automatically positioning and fixing the optical fiber 2 by inserting the optical fiber therein is formed of comb toothed V-grooves 6 composed of plural V-grooves (a), (b) varying in size. The V-grooves formed by anisotropic etching are divided into plural regions according to such constitution of the comb toothed V-grooves 6 and, therefore, even if a crystal defect exists in one V-groove slope thereof, the part where the (111) face moves around the crystal defect is suppressed in this V-groove slope part and, therefore, the several V-grooves where the crystal defects do not exist among the plural V-grooves are produced with the working accuracy of several μm. The optical fiber is fixed by using the V-grooves having such high accuracy, by which optical axis alignment is executed simply by placing the optical fiber and the fixing operation is shortened. |
