发明名称 |
Semiconductor device having an emitter terminal separated from a base terminal by a composite nitride/oxide layer |
摘要 |
A semiconductor device (8) has an insulating layer (16) overlying a semiconductor substrate (12). The insulating layer has a first opening that defines an aperture (18) extending from the insulating layer to the semiconductor substrate, and at least a first portion of a first conductive terminal (42) is disposed in the aperture. A second conductive terminal (52) has a second portion (28) disposed in the aperture. The second portion of the second conductive terminal is separated from the first conductive terminal by a composite dielectric layer including a nitride layer (32) and an oxide layer (30). In one approach, the oxide layer is formed by the oxidation of the second portion of the second conductive terminal.
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申请公布号 |
US5512785(A) |
申请公布日期 |
1996.04.30 |
申请号 |
US19940347522 |
申请日期 |
1994.11.30 |
申请人 |
MOTOROLA, INC. |
发明人 |
HAVER, HARRISON B.;GRISWOLD, MARK D. |
分类号 |
H01L23/485;H01L23/532;(IPC1-7):H01L23/58 |
主分类号 |
H01L23/485 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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