| 发明名称 |
PFPE coatings for micro-mechanical devices |
| 摘要 |
A micro-mechanical device (10) includes relatively movable elements (11, 17) which contact or engage and which thereafter stick or adhere. A perfluoropolyether (PFPE) film (31) is applied to the contacting or engaging portions of the elements (11,17) to ameliorate or eliminate such sticking or adhesion.
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| 申请公布号 |
US5512374(A) |
申请公布日期 |
1996.04.30 |
| 申请号 |
US19940239497 |
申请日期 |
1994.05.09 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WALLACE, ROBERT M.;HENCK, STEVEN A.;WEBB, DOUGLAS A. |
| 分类号 |
G02B26/08;B81B3/00;B81C1/00;C08G65/00;C09D171/00;C09D171/02;(IPC1-7):B32B27/00 |
主分类号 |
G02B26/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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