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发明名称
TARGET FOR SPUTTERING AND ITS PRODUCTION
摘要
申请公布号
JPH08109472(A)
申请公布日期
1996.04.30
申请号
JP19940249780
申请日期
1994.10.14
申请人
ASAHI GLASS CO LTD
发明人
KIDA OTOJIRO;SUZUKI ERI
分类号
C23C14/34;C23C4/08;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
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