| 摘要 |
<p>PURPOSE: To make an observable visual field large and to make inexpensive by providing a pinhole plate on the slightly deviated position from the focal distance of a microlens in the direction of an optical axis. CONSTITUTION: The output light beam of a laser 1a scans the front surface of a sample 6a by passing it through the respective microlenses of a microlens plate 2a and the respective pinholes of a pinhole plate 4a being synchronously rotated. The returned light beam from the sample 6a is converged on the pinhole on the pinhole plate 4a through an objective lens 5a and the beam passed through the pinhole is made incident on the microlens on the microlens plate 2a. At this time, since the pinhole plate 4a is not provided on the position of the focal distance of the microlens but provided on the position slightly deviated in the direction of optical axis as is shown in the figure, the light beam transmitted through the microlens plate 2a is not made to be a parallel beam and forms the image on a photographing device 8a by means of the microlens on the microlens plate 2a.</p> |
