METHOD AND APPARATUS FOR HEATING SURFACE TREATMENT WORKPIECE IN BELT-DRIVEN ATMOSPHERIC PRESSURE CVD SYSTEM,申请号JP19940245798-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR HEATING SURFACE TREATMENT WORKPIECE IN BELT-DRIVEN ATMOSPHERIC PRESSURE CVD SYSTEM
摘要
申请公布号	JPH08111408(A)	申请公布日期	1996.04.30
申请号	JP19940245798	申请日期	1994.10.12
申请人	SONY CORP	发明人	IKEDA HIDEAKI
分类号	C23C16/46;C23C16/52;C23C16/54;H01L21/205;H01L21/31;(IPC1-7):H01L21/31	主分类号	C23C16/46
代理机构		代理人
主权项
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