ALIGNING METHOD AND DEVICE

摘要

PURPOSE: To provide a method and a device for aligning an object at a high speed without deteriorating it in positioning accuracy. CONSTITUTION: The picture image of an object picked up by a picture image input device is stored in a memory 3. A candidate point extracting means 4 extracts one to a few candidate points from a one-dimensional projection distribution of the picture image of the object stored in the memory 3 in the directions of X and Y. A rough positioning means 5 is made to match up the extracted candidate points with a reference picture image through a variable- density pattern to carry out rough positioning. A fine positioning means 6 matches up the extracted candidate points with the reference picture image through a variable-density pattern to execute fine positioning in a spiral in a region adjacent to a rough positioning region.