| 摘要 |
PURPOSE: To accurately judge a plurality of patterns with different widths by setting the line width allowable value of a pattern to be inspected, determining the line kind of pattern after each of measured values is compared with it and generating a radial code based on the result. CONSTITUTION: A storage circuit 14 stores a binarization data of reference pattern of a pattern to be inspected, and a measuring circuit 15 measures a measurement value based on this data, then a center detecting circuit 16 detects a central signal. A length measurement value and central signal are inputted in an allowable value determining circuit 17 and the maximum and minimum values of the allowable value for line width that is to be applied for the pattern to be inspected are obtained thereby. The circuits 16 and 17 expand the width to be judged as a center as far as possible according to the width of a reference line and the deviation between the reading positions of the pattern to be inspected that is piked up by a CCD camera 2 and the reference pattern from the circuit 14 is covered. When the deviation is large, it is corrected by a positioning circuit 19. When the correction cannot be made, a central signal comparing circuit 18 outputs an omission failure signal to an OK/NG judging circuit 11. Thus, a plurality of wiring patterns can be judged individually. |
