发明名称 |
Micromotion stage |
摘要 |
A micromotion stage comprises a stationary plate and a moving plate connected by six links each consisting of a stacked piezoelectric element serving as an actuator, a holder fixed at one end of the stacked piezoelectric element, a capacitance type displacement gage retained by the holder and a target member fixed at the other end of the stacked piezoelectric element to have a part thereof face a tip portion of the capacitance type displacement gage across a small gap. Change in the distance between the holder and the target member caused by expansion or contraction of the stacked piezoelectric element and indicative of a change in the link stroke can be detected by the capacitance type displacement gage.
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申请公布号 |
US5511931(A) |
申请公布日期 |
1996.04.30 |
申请号 |
US19950389502 |
申请日期 |
1995.02.16 |
申请人 |
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY;MINISTRY OF INTERNATIONAL TRADE & INDUSTRY |
发明人 |
ARAI, TATSUO;KOMATSU, NAOTAKA |
分类号 |
G01N37/00;B25J17/02;B25J19/02;G01Q10/04;G01Q90/00;G05D3/00;H01J37/20;H01L41/09;(IPC1-7):B25J11/00 |
主分类号 |
G01N37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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