发明名称 |
STORAGE AND DELIVERY SYSTEM FOR GASEOUS COMPOUNDS |
摘要 |
An adsorption-desorption apparatus (102), and process for storage and dispensing of a gas, e.g., hydride and halide gases, and organometallic Group V compounds, which is selectively dispensed by pressure differential desorption of the sorbate gas from the sorbent material. The sorbent material is preferably a material which is devoid of concentration of trace components such as water, metals and oxidic transition metal species which would significantly decompose the sorbate gas in apparatus (102).
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申请公布号 |
WO9611739(A1) |
申请公布日期 |
1996.04.25 |
申请号 |
WO1995US13040 |
申请日期 |
1995.10.13 |
申请人 |
ATMI ECOSYS CORPORATION;TOM, GLENN, M.;MCMANUS, JAMES, V. |
发明人 |
TOM, GLENN, M.;MCMANUS, JAMES, V. |
分类号 |
B01D53/04;B01J4/02;B01J20/18;B01J20/20;F17C11/00;(IPC1-7):B01D53/04 |
主分类号 |
B01D53/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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