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发明名称
Verfahren zum Herstellen eines kapazitiven Absolutdrucksensors durch Mikrobearbeitung einer Oberfläche eines Halbleitersubstrats sowie solchermaßen hergestellter Absolutdrucksensor
摘要
申请公布号
DE4401999(C2)
申请公布日期
1996.04.25
申请号
DE19944401999
申请日期
1994.01.25
申请人
FORD-WERKE AG, 50735 KOELN, DE
发明人
MASTRANGELO, CARLOS HORACIO, ANN ARBOR, MICH., US
分类号
G01L7/00;G01L9/00;G01L9/12;H01L29/84;(IPC1-7):H01L21/306;H01L49/00
主分类号
G01L7/00
代理机构
代理人
主权项
地址
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